Cameca LEAP 4000 HR Atom Probe

State-of-the-art atomic-scale analysis capabilities for Deakin.

FEI Quanta 3D FEG FIB-SEM

FEI Quanta 3D FEG FIB-SEM

The FEI Quanta 3D FEG FIB-SEM enables imaging, analysis and manipulation of microstructures using a combination of a field-emission gun scanning electron microscope with a gallium focused ion beam and a platinum gas-injection system.

Applications

Site-specific sectioning with imaging, EDS or EBSD
Serial sectioning with imaging, EDS or EBSD
Site-specific sample preparation for TEM and APT
Nano-scale and micro-scale milling, deposition and fabrication

Features

Detectors
  • Secondary Electron (SE): Everhart-Thornley
  • Backscatter Electron (BSE): Solid State Diode
  • Energy Dispersive X-ray (EDX): Apollo
  • Electron Backscatter Diffraction (EBSD): Hikari
Automation Software
  • Multi-site Milling (AutoFIB)
  • TEM Specimen Preparation (AutoTEM)
  • Serial Sectioning and Imaging (Slice and View)
  • Serial Sectioning and EBSD/EDS (EBS3)
Data Acquisition Software
  • Energy Dispersive X-ray (EDX): Genesis
  • Electron Backscatter Diffraction (EBSD): OIM
Data Processing Software
  • 2D Images (Photoshop, ImageJ)
  • 3D Images (Amira, Avizo, Paraview)
  • 2D EBSD Data (Channel, CrossCourt, OIM)
  • 3D EBSD Data (Dream3D, OIM)

Specifications

Electron Optics
FEG Source, High Current Electron Column
Accelerating Voltage: 0.2 to 30 kV
Probe Current: Up to 200 nA
Magnification: 30x to 1280 kx (Quad Mode)
Ion Optics
Ga Liquid Metal Ion Source, High Current Ion Column
Accelerating Voltage: 2 to 30 kV
Probe Current: 1 pA to 65 nA
Magnification: 40x to 1280 kx (Quad Mode)
Charge Neutralisation Mode
Electron beam resolution
High Vacuum: 1.2 nm at 30 kV (SE), 2.5 nm at 30 kV (BSE), 2.9 nm at 1 kV (SE)
Low Vacuum: 1.5 nm at 30 kV (SE), 2.5 nm at 30 kV (BSE), 2.9 nm at 3 kV (SE)
Extended Low Vacuum (ESEM): 1.5 nm at 30 kV (SE)
Ion beam resolution
7 nm at 30 kV at beam coincident point, 5 nm at 30 kV at optimal working distance
Chamber vacuum
High Vacuum: < 6E-4 Pa
Low Vacuum: 10 to 130 Pa
Extended Low Vacuum (ESEM): 10 to 4000 Pa

Instrument Output Examples

Output from FEI Quanta 3D FEG FIB-SEM Output from FEI Quanta 3D FEG FIB-SEM Output from FEI Quanta 3D FEG FIB-SEM

Deakin University acknowledges the traditional land owners of present campus sites.

23rd January 2014