Leo 1530 FEG SEM

The LEO 1530 is a high resolution scanning electron microscope (SEM) that uses a Schottky-type field-emission electron source. A beam booster is used to optimise electron optical performance at all accelerating voltages. In addition, the optical column has no crossovers and utilises a magnetic/electrostatic objective lens to minimise beam imperfections at low voltage by reducing chromatic aberration.



  • 1 kV / 3 nm, 20 kV / 1 nm


  • 20X to 900,000X

Accelerating Voltage

  • 200 V to 30 kV

Probe Current

  • 4 pA to 10 nA

Electron Gun

  • Thermal field emission type

Specimen Stage

  • x=75mm, y=75mm, z=25mm (all motorized)
  • Working distance 2mm - 45mm+


  • High efficiency In-lens secondary electron detector
  • Everhart-Thornley Secondary Electron Detector
  • Backscattered electron detector (Rutherford Type) Electron Backscatter Diffraction (EBSD) detector
  • Oxford (HKL) Nordlys S with high resolution CCD for high angular resolution

Image Processing

  • Seven integration and averaging modes

Image Store Resolution

  • 512 x 384 → 3072 x 2304 pixel

Thermal tension-compression stage

  • 800°C + 5kN & 1kN load cells
  • Tilt option for combined EBSD mapping

Instrument Output Examples

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