Deakin Research

Institute for Frontier Materials

Electron Microscope Facility

Scanning Electron Microscopes

The scanning electron microscopes in this facility are used to investigate surface morphology, crystalline properties (type and orientation) and composition in solid materials.

Imaging in an SEM requires an energized beam of electrons directed at a piece of material so that they interact with a thin surface layer of material. This interaction produces different types of emissions, some of which are captured by detectors and converted into images.

Transmission Electron Microscope

Imaging in a TEM requires the transmission of an energized beam of electrons through a thin piece of material so that they interact with the material as they pass through. This interaction produces different types of emissions, some of which are captured by detectors and converted into images.

Key instrumentation

  1. FEI Quanta 3D FIB FEG SEM – automated 3D EBSD/EDS (simultaneous) + insitu manipulator + Pt GIS
  2. Zeiss Supra 55VP FEG SEM – EBSD (Nordlys F) + EDX (INCA X-Max 20 SDD) + Zeiss AsB + Inlens SE + Insitu straining/heating compatible with EBSD and AsB detectors
  3. Leo 1530 FEG SEM - EBSD (Nordlys S) + Inlens SE + Insitu straining/heating compatible with EBSD detector
  4. JEOL JEM 2100 LaB6 TEM – Jeol EDX + Jeol Electron Tomography + Gatan Insitu straining/heating stage
  5. JEOL JEM 2100F FEG TEM – Gatan 965 GIF Quantum ER (9mm aperture) + Nanomegas Digistar™ automated crystal orientation mapping system + Jeol SDD EDX
  6. Cameca LEAP 4000HR – Atom probe (delivery due March 2013)

Capabilities / Specialist services

  1. Electron Backscatter Diffraction (EBSD) for FEG SEM: 2D fast acquisition (HKL Nordlys F) with integrated EDX for phase ID + 2D high angular resolution (HKL Nordlys S) + 3D automated serial section in FIB (TSL Hikari) with integrated EDX for phase ID
  2. Automated Crystal Orientation Mapping (ACOM – Digistar™) for FEG TEM: Precessed or non-precessed acquisition and ID of crystal lattice diffraction patterns to determine submicron crystal orientations
  3. High resolution crystal strain mapping (Crosscourt software)

Associated Expertise

  • Dr Andrew Sullivan – Manager of Electron Microscopy. SEM training (imaging, insitu, EBSD, EDX)
  • Dr Mark Nave – Manager of Dual Beam FEI Quanta 3D. FIB training (imaging, 2D/3D EBSD, ion milling)
  • Dr Pavel Cizek – Senior researcher in metallurgy. Specialist in electron diffraction and Nanomegas system
  • Dr Nicole Stanford – Senior researcher in metallurgy
  • Ms Rosey van Driel – Manager of TEM operations. TEM training (imaging, insitu, EELS and EDX)

Associated Infrastructure Support

The centre holds a comprehensive collection of equipment supporting electron microscopy including:
  • Ion polisher
  • Vacuum storage
  • Critical point dryer
  • Conventional and vacuum furnaces
  • Electro-polishing units
  • Chemical etching facilities

Deakin University acknowledges the traditional land owners of present campus sites.

24th September 2012