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Leo 1530 field emission gun

The LEO 1530 is a high resolution field emission scanning electron microscope (SEM), which together with an energy dispersive x-ray detector (EDX system from Gresham) provides the ability to visualise and to analyse surface features of material as small as 0,3 microns in diameter. This makes SEM / EDX a suitable system for the analysis of a variety of non-volatile materials including metals, minerals, polymers and discrete objects such as particles and fibres.

Specifications:

• Resolution 1 kV / 3 nm, 20 kV / 1 nm
• Magnification 20X to 900,000X
• Accelerating Voltage 200 V to 30 kV
• Probe Current Thermal field emission type
• Electron Gun Thermal field emission type
• Specimen Stage x=75 mm, y=75 mm, z=25 mm (all motorized), Working distance 2mm - 45mm+
• Detectors
  • In-Lens annular (SE1)
  • Secondary Electron (SE2)
  • Backscattered (BSD)
  • Electron Backscatter Diffraction (EBSD)
  • Energy Dispersive X-ray (EDX)
• Image Processing
  • Pixel averaging
  • Frame/line averaging & integration
  • Continuous averaging
• Image Store Resolution 512 x 384 3072 x 2304 pixel
• Thermal tension-compression stage 800 C + 5kN & 1kN load cells